Thermodynamics and Kinetics of the Reaction of Catalytic Dismutation of Chlorosilanes in the Vapor Phase in the Temperature Range of 353–393 K

Currently, the most common method of silane synthesis for electronics and photovoltaics is trichlorosilane (TS) dismutation. TS dismutation proceeds in form a reactions cascade, therefore its study both practical scientific interest. The results calculating equilibrium composition reaction mixture vapor phase based on literature data from various sources were not reliable. Therefore, dependence time contact with catalyst under static conditions was experimentally investigated. stationary mixture, close to equilibrium, determined. A good agreement obtained one shown. kinetics dichlorosilane (DCS) carried out by flow method. As result regression analysis experimental data, rate constants direct reverse TS, DCS, monochlorosilane (MSC) obtained. used calculate mixture. between calculated